Introduction to Microlithography (ACS Professional Reference Book)

Introduction to Microlithography (ACS Professional Reference Book)

Editorial Reviews Book Description Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist
processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific
aspects of microlithography.

Introduction to Microlithography (ACS Professional Reference Book),Larry F. Thompson,C. Grant Willson,Murrae J. Bowden,An American Chemical Society Publication,0841228485,Chemistry - Organic,Chemistry - Physical & Theoretical,Congresses,Electronic Apparatus And Devices,Electronics - Circuits - Printed,Microelectronics,Microlithography,Photoresists,Plasma etching,Science,Science/Mathematics,Semiconductors,Art techniques & materials,Chemistry | Materials Chemistry,Circuits & components,Industrial Chemistry & Manufacturing Technologies,PHYSICS,Planographic processes (eg lithography, screen printing, stencilling),Production & quality control management,Science / Chemistry / Organic

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